Method for generating an electrical contact with buried track conductors

ABSTRACT

A semiconductor structure  300  comprises a plurality of first track conductors  303 , a plurality of second track conductors  304 , which are insulated with respect to the first track conductors  303  and form a grid together with these first track conductors  303 , and a plurality of third track conductors  307  parallel above the first track conductors  303 , which third track conductors  307  partly cover the second track conductors  304  and are insulated with respect thereto, in which semiconductor structure  300 , between in each case two adjacent second track conductors  304 , there is located an electrical contact  305  between each first track conductor  303  and the corresponding third track conductor  307  which lies above it.

This application is a divisional of U.S. patent application Ser. No.10/159,859, filed May 31, 2002, now U.S. Pat. No. 6,909,153 which claimspriority to German Patent Application Number 101 27 350.9, filed Jun. 6,2001.

BACKGROUND OF THE INVENTION

The invention relates to a semiconductor structure having buried trackconductors and to a method for generating an electrical contact withburied track conductors.

According to the prior art, memory cell arrangements, for example flashmemories, are produced as large matrix-like memory arrays comprisingtransistors. A certain arrangement of track conductors is required bothfor storage and to read out the memory cells. To optimize the spacerequired, some of the track conductors are diffused into a semiconductorsubstrate as buried bit lines. However, diffused-in bit lines have theproblem that the electrical resistances of the diffused-in bit lines arehigher than the electrical resistances of track conductors inmetallization levels.

The RC time constant which results from the level of the resistances ofthe diffused-in bit lines consequently limits the signal propagationtime. The term signal propagation time is to be understood as meaningthe time required to write to memory cells or to read them out.According to the prior art, to reduce the signal propagation time ineach case one metallic track conductor is used in parallel to thediffused-in bit lines. These metallic track conductors are electricallyconnected to the diffused-in bit lines at regular intervals by means ofcontacts, known as stitch contacts. This allows the resistance of thediffused-in bit lines and therefore the signal propagation time to beresistance of the diffused-in bit lines and therefore the signalpropagation time to be reduced. For clarification, FIG. 1 and FIG. 2show a semiconductor structure which represents a memory cellarrangement of this type.

FIG. 1 shows a top view of a semiconductor structure 100 in accordancewith the prior art.

In a semiconductor substrate 101, a group of first track conductors 103is integrated at a substrate surface 102. The first track conductors 103are arranged parallel and next to one another and end substantiallyflush with the substrate surface 102. The first track conductors 103 areusually produced by means of diffusion of electrically conductive ionsinto the semiconductor substrate 101. The first track conductors 103may, for example, be provided as buried bit lines.

Furthermore, on the substrate surface 102 of the semiconductor substrate101 there is a group of second track conductors 104, which are arrangedparallel and next to one another on the substrate surface 102,electrically insulated with respect to the first track conductors 103.Together with the first track conductors 103, the second trackconductors 104 form a regular grid. The second track conductors 104 areusually produced by means of conventional methods for producingmetallization levels.

In each case two adjacent first track conductors 103 and one secondtrack conductor 104 which lies above them form a transistor. The twofirst track conductors 103 act as the two transistor electrodes known assource and drain in the transistor region, for which reason the firsttrack conductors 103 are referred to as bit lines. In the transistorregion, the second track conductor 104 acts as the transistor electrodeknown as gate, for which reason the second track conductors 104 arereferred to as word lines.

On the substrate surface 102, in each transistor region anoxide-nitride-oxide layer sequence (not shown) comprising silicondioxide (SiO₂) and silicon nitride (Si₃N₄) is located between the firsttrack conductors 103 and below each second track conductor 104, it beingpossible for up to two bits to be stored in the silicon nitride layer.

To reduce the electrical resistance, the first track conductors 103 areconnected to metallic bit lines 106 by means of self-aligning contacts105. These metallic bit lines 106 run in parallel over the first trackconductors 103, bridge the second track conductors 104 and areelectrically insulated with respect to the second track conductors 104.Contact is made between the first track conductors 103 and the metallicbit lines 106 in the direction of the metallic bit lines 106 by means ofthe self-aligning contacts 105 after in each case four second trackconductors 104.

FIG. 2 shows a part of a cross section through the semiconductorstructure 100 shown in FIG. 1, on section line A—A.

A first insulating layer 201 is located above the substrate surface 102and therefore above the first track conductors 103, which are integratedin the semiconductor substrate 101. The first insulating layer 201 isintended to provide electrical insulation between the second trackconductors 104 and the first track conductors 103. Furthermore, thesecond track conductors 104 are encapsulated by a second insulatinglayer 202, and a third insulating layer 203 fills up empty regionsbetween the second track conductors 104, in order to ensure that thesecond track conductors 104 are electrically insulated with respect tothe self-aligning contacts 105 and with respect to the metallic bitlines 106.

The following process sequence is usually employed to produce theself-aligning contacts 105: after the first insulating layer 201 and thesecond track conductors 104 have been produced, the second trackconductors 104 are encapsulated by a second insulating layer 202. Forthis purpose, first of all an insulating material is deposited over thesurface of the second track conductors 104. Then, an etching mask isapplied above the second track conductors 104 and the insulatingmaterial at exposed locations which are not covered by the etching maskare removed all the way to the substrate surface 102. Then, the etchingmask is removed again.

Then, the third insulating layer 203 is produced in the exposed openingsbetween the second track conductors 104. In this case, the material usedfor the third insulating layer 203 is usually an insulating materialwhich can be etched selectively with respect to the insulating materialof the second insulating layer 202. By way of example, silicon nitride(Si₃N₄) can be used for the second insulating layer 202 and silicondioxide (SiO₂) for the third insulating layer 203.

To complete production of the self-aligning contacts 105, the thirdinsulating layer 203 is now removed at certain places, and in this waythe first track conductors 103 are locally uncovered again. Thesecertain places are then filled with an electrically conductive material,for example tungsten, until the second insulating layer 202, theremaining third insulating layer 203 and the certain places which havebeen filled with electrically conductive material have a common surface204 which is parallel to the substrate surface 102. The certain placeswhich have been filled with electrically conductive material now act asself-aligning contacts 105.

In the end, the metallic bit lines 106 are located on the common surface204 and are required for coupling of electrical signals into thesemiconductor structure 100. Furthermore, the metallic bit lines 106create the possibility of making contact with the integrated first trackconductors 103 by means of a plurality of self-aligning contacts 105.

As has already been mentioned above, therefore, to reduce the signalpropagation time, in accordance with the prior art in each case onemetallic bit line is used in parallel with the diffused-in bit lines.The metallic bit lines are electrically connected to the diffused-in bitlines by means of the self-aligning contacts at intervals of four wordlines. The contacts only align themselves perpendicular to the secondtrack conductors.

However, the above-described method for producing the self-aligningcontacts does not allow alignment parallel to the second trackconductors. Therefore, there is a risk of a contact being producedoffset parallel to the second track conductors. An offset contact ofthis type can lead to electrostatic effects on the semiconductorsubstrate, which can cause a short circuit between adjacent diffused-inbit lines. A short circuit of this type inevitably leads to failure ofthe immediately adjacent transistors. It is possible that all thetransistors in the relevant bit lines may even be affected by thisdisturbance. Therefore, when the etching mask is being produced duringthe production process for each individual contact, the etching mask hasto be positioned very accurately, which involves a high level of outlay.

The invention is therefore based on the problem of providing asemiconductor structure and a method for generating an electricalcontact, in which the signal propagation times in the semiconductorstructure are reduced further and more reliable contact is ensured.

The problem is solved by a semiconductor structure and a method forgenerating an electrical contact which have the features described inthe independent patent claims.

SUMMARY OF THE INVENTION

A semiconductor structure comprises a plurality of first trackconductors which run substantially parallel to one another and areprovided in a semiconductor substrate. Furthermore, the semiconductorstructure comprises a plurality of second track conductors which runsubstantially parallel to one another, are located on the semiconductorsubstrate, are insulated with respect to the first track conductors and,together with the first track conductors, form a grid. Moreover, thesemiconductor structure comprises a plurality of third track conductorswhich are arranged substantially parallel above the first trackconductors, partially cover the second track conductors and areinsulated with respect to the second track conductors. Finally, anelectrical contact between each first track conductor and the respectivethird track conductor lying above it is provided between in each casetwo adjacent second track conductors.

In a method for generating an electrical contact with a plurality offirst track conductors which run substantially parallel to one anotherand are provided in a semiconductor substrate, a plurality of secondtrack conductors, which run substantially parallel to one another, areapplied to the semiconductor substrate in such a manner that the secondtrack conductors, together with the first track conductors, form a grid,and that the second track conductors are insulated with respect to thefirst track conductors. Furthermore, a plurality of third trackconductors are applied substantially parallel above the first trackconductors and partly above the second track conductors, electricalinsulation being produced between the third track conductors and thesecond track conductors. Moreover, between in each case two adjacentsecond track conductors, an electrical contact is produced forgenerating an electrical contact with the first track conductors betweeneach first track conductor and the respective third track conductorlying above it.

One advantage of the invention can be considered to lie in the fact thatthe problem of the long signal propagation times in the semiconductorstructure is reduced as a result of suitable contact between the firsttrack conductors and the third track conductor which is in each casearranged substantially parallel above it being ensured by means of ineach case one contact between in each case two adjacent second trackconductors. The contacts which are provided for the respective firsttrack conductor can be produced by means of a single, continuous etchingmask which is oriented substantially parallel to the first trackconductor.

A further advantage of the invention is that, on account of the largenumber of contacts, the contacts can be made narrower, in the directionperpendicular to the first track conductors, than the contacts used inthe prior art without any increase in the signal propagation time. Thenarrower contacts mean that, in the semiconductor structure according tothe invention the contacts can be produced successfully even if theetching mask position lacks precision. Moreover, if thecontact-generating arrangement is structured suitably, it is possible toeliminate a part of the production process, resulting in a significantreduction in the process costs.

Generating a contact with the first track conductors between in eachcase two adjacent second track conductors also has the advantage thatcontact is made with all places on each first track conductor in thesame way, and that the same electrical properties are present at allplaces on each first track conductor. Therefore, each first trackconductor has the same signal propagation time at all places.

In the semiconductor structure according to the invention, the firsttrack conductors preferably each have a first width and the electricalcontacts preferably each have a second width. The two widths are in thiscase oriented parallel to the first track conductors and perpendicularto the longitudinal direction of the first track conductors. The secondwidth is preferably less than the first width.

In the semiconductor structure according to the invention, a transistoris preferably formed in each case by two adjacent first track conductorsand a second track conductor which lies above them. The semiconductorstructure according to the invention therefore preferably represents atransistor arrangement.

Furthermore, the semiconductor structure according to the inventionpreferably comprises an oxide-nitride-oxide layer sequence on thesemiconductor substrate, beneath the second track conductor and betweenadjacent first track conductors.

In a preferred embodiment of the semiconductor structure according tothe invention, the transistor, which is in each case formed by twoadjacent first track conductors and a second track conductor which liesabove them, is a 2-bit memory transistor. This allows the transistorarrangement to be used as a memory cell arrangement.

The electrical contacts of the semiconductor structure according to theinvention preferably bridge the second track conductors in an insulatedmanner. Furthermore, the semiconductor structure according to theinvention is preferably formed in such a manner that electricalcontacts, which are adjacent above one of the first track conductors,overlap and thereby themselves form the third track conductors. Theresult is a continuous, connected row of contacts. In this case, thereis no need for an independent metallization level in which the thirdtrack conductors are arranged. Not only does this reduce the number oflayers required on the semiconductor substrate, but also the materialscosts of the semiconductor structure according to the invention arereduced.

In a preferred refinement of the method according to the invention, thefirst track conductors are each produced with a first width and theelectrical contacts are each produced with a second width. The twowidths are in this case oriented parallel to the first track conductorsand perpendicular to the longitudinal direction of the first trackconductors. The second width is preferably less than the first width.

The second track conductors are preferably produced above the firsttrack conductors in such a manner that in each case two adjacent firsttrack conductors and a second track conductor lying above them form atransistor. Therefore, a transistor arrangement is preferably producedfrom the first track conductors and the second track conductors.

It is preferable, before the second track conductors are produced, foran oxide-nitride-oxide layer sequence to be produced on thesemiconductor substrate between adjacent first track conductors.

In a preferred refinement of the process according to the invention, thetransistor, which is in each case formed by two adjacent first trackconductors and a second track conductor which lies above them, isproduced in such a manner that it can be used as a 2-bit memorytransistor.

It is preferable for the electrical contacts to be formed in such amanner that they bridge the second track conductors and that electricalcontacts which are adjacent above one of the first track conductorsoverlap and thereby themselves form the third track conductors. Thismakes it possible to dispense with the complex production of anindependent metallization level in which the third track conductors arearranged. This firstly reduces the number of process steps required inthe production process and secondly therefore reduces the process costs.

Exemplary embodiments of the invention are illustrated in the figuresand are explained in more detail below. In the figures, identicalreference numerals denote identical components and:

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a top view of a semiconductor structure in accordance withthe prior art;

FIG. 2 shows a part of a cross section through the semiconductorstructure shown in FIG. 1 on section line A—A;

FIG. 3 shows a top view of a semiconductor structure in accordance witha first exemplary embodiment of the invention;

FIG. 4 shows a part of a cross section through the semiconductorstructure shown in FIG. 3 on section line B—B;

FIG. 5 shows a top view of a semiconductor structure in accordance witha second exemplary embodiment of the invention; and

FIG. 6 shows a part of a cross section through the semiconductorstructure shown in FIG. 5 on section line C—C.

FIG. 3 shows a top view of a semiconductor structure 300 in accordancewith a first exemplary embodiment of the invention.

DETAILED SPECIFICATION

In the first exemplary embodiment of the invention, a group of firsttrack conductors 303 is integrated in a semiconductor substrate 301 at asubstrate surface 302. The first track conductors 303 are arrangedsubstantially parallel to one another and end substantially flush withthe substrate surface 302. The first track conductors 303 are usuallyproduced by means of diffusion of electrically conductive ions into thesemiconductor substrate 301. The first track conductors 303 may beprovided, for example, as buried bit lines.

Furthermore, a group of second track conductors 304, which are arrangedon the substrate surface 302, substantially parallel to one another andelectrically insulated with respect to the first track conductors 303,is located on the substrate surface 302 of the semiconductor substrate301. The second track conductors 304 form a substantially regular gridtogether with the first track conductors 303. The second trackconductors 304 are usually produced by means of conventional methods forthe production of metallization layers.

In each case two adjacent first track conductors 303 and a second trackconductor 304 which lies above them form a transistor. In the transistorregion, the two first track conductors 304 act as the two transistorelectrodes known as source and drain, for which reason the first trackconductors 303 are referred to as bit lines. In the transistor region,the second track conductor 304 acts as the transistor electrode known asgate, for which reason the second track conductors 304 are referred toas word lines.

In each transistor region, an oxide-nitride-oxide layer sequence (notshown) comprising silicon dioxide (SiO₂) and silicon nitride (Si₃N₄) islocated between the first track conductors 303 and below each secondtrack conductor 304 on the substrate surface 302, it being possible forup to two bits to be stored in the silicon nitride layer.

The first track conductors 303 are connected to metallic contactinglines 306 by means of self-aligning contacts 305, which metalliccontacting lines 306 are in turn coupled to metallic bit lines 307. Themetallic contacting lines 306 and the metallic bit lines 307 runsubstantially parallel over the first track conductors 303, bridge thesecond track conductors 304 and are electrically insulated with respectto the second track conductors 304. The metallic contacting lines 306have the purpose of electrically connecting the self-aligning contacts305 to the metallic bit lines 307.

The first track conductors 303 have a track conductor width 308, and theself-aligning contacts 305 have a contact width 309. Since the contactwidth 309 is narrower than the track conductor width 308, it is possibleto reduce the demands imposed on the accuracy of the contact positionduring production of the self-aligning contacts 305 compared to theprior art. This considerably reduces the outlay involved in productionof the semiconductor structure 300 according to the invention.

Between in each case two adjacent second track conductors 304 there isalways one self-aligning contact 305 located between the respectivefirst track conductor 303 and the metallic contacting line 306 above it.According to this exemplary embodiment, the self-aligning contacts 305and the metallic contacting lines 306 consist of tungsten and areproduced in a common metallization process. For this purpose, aprotective layer is applied to locations of the semiconductor structure300 at which locations it is desired that neither self-aligning contacts305 nor metallic contacting lines 306 are formed. The openings whichremain in the protective layer are then filled with metal in order toform the self-aligning contacts 305 and the metallic contacting lines306. Finally, the protective layer is removed again.

FIG. 4 shows a part of a cross section through the semiconductorstructure 300 shown in FIG. 3 on section line B—B.

Over the substrate surface 302 and therefore above the first trackconductors 303 which are integrated in the semiconductor substrate 301,there is located a first insulating layer 401. The first insulatinglayer 401 is provided for the purpose of electrical insulation betweenthe second track conductors 304 and the first track conductors 303.Furthermore, the second track conductors 304 are encapsulated by asecond insulating layer 402, in order to ensure that the second trackconductors 304 are electrically insulated with respect to theself-aligning contacts 305 and with respect to the metallic contactinglines 306.

First of all, an insulating material is deposited entirely over thesubstrate surface 302 and the second track conductors 304 in order toencapsulate the second track conductors 304. Then, an etching mask isapplied above the second track conductors 304, covering the second trackconductors 304 and a region between adjacent second track conductors 304which is close to the second track conductors 304. Then, the insulatingmaterial is removed down to the substrate surface 302 at exposedlocations which are not covered by the etching mask. Then, the etchingmask is removed again. In this exemplary embodiment of the invention,silicon nitride (Si₃N₄) is used for the second insulating layer 402.

The exposed openings between the second track conductors 304 are thenfilled with an insulating material which can be etched selectively withrespect to the insulating material of the second insulating layer 402.In this exemplary embodiment of the invention, silicon dioxide (SiO₂) isused as insulating material between the second track conductors 304.

Then, to produce the self-aligning contacts 305, an etching mask is usedfor removal of the silicon dioxide (SiO₂) in narrow but long regionswhich are oriented substantially parallel to the first track conductors303, above the respective first track conductors 303. Both the etchingmask and the openings have the desired contact width 309. As a result,the first track conductors 303 are locally uncovered again. The exposedfirst track conductors 303 are then covered with an electricallyconductive material, according to this exemplary embodiment withtungsten, until the electrically conductive material forms a commonsurface 403, substantially parallel to the substrate surface 302, withthe second insulating layer 402.

Then, the openings in the etching mask above the common surface 403 arelikewise filled with the electrically conductive material, with theresult that the metallic contacting lines 306 are formed. Then, theetching mask can be removed again.

Finally, the metallic bit lines 307 are located on the metalliccontacting lines 306, which metallic bit lines 307 are required forcoupling the electrical signals into the semiconductor structure 300.

FIG. 5 shows a top view of a semiconductor structure 500 in accordancewith a second exemplary embodiment of the invention.

The second exemplary embodiment of the invention differs from the firstexemplary embodiment of the invention only through the fact that themetallic contacting lines 306 and the metallic bit lines 307 arecombined to form metallic contacting and bit lines 501.

This can be achieved, for example, in the following way: first of all,the etching mask which is required for production of the self-aligningcontacts 305 is produced on the semiconductor structure 500 being formedwith a thickness which is greater than in the first exemplary embodimentof the invention. If, after the self-aligning contacts 305 have beenproduced, the openings which remain in the etching mask are thencompletely filled with the electrically conductive material and theetching mask is removed again, metallic contacting lines 306 are formedand can simultaneously be used as metallic bit lines 307. Consequently,the result is combined metallic contacting and bit lines 501.

The production costs of the semiconductor structure 500 in accordancewith the second exemplary embodiment of the invention can be reducedsignificantly since there is no need for the final metallization level,in which the independent metallic bit lines 307 would be present. Thisallows the overall production costs to be reduced by up to 10%.

FIG. 6 shows a part of a cross section through the semiconductorstructure 500 shown in FIG. 5 on section line C—C.

This illustration clearly demonstrates the existence of combinedmetallic contacting and bit lines 501. For further details, reference ismade to the description given for FIG. 4.

1. Method for generating an electrical contact with a plurality of firsttrack conductors which run substantially parallel to one another and areprovided in a semiconductor substrate, the method comprising: applying aplurality of second track conductors, which run substantially parallelto one another, to the semiconductor substrate in such a manner that thesecond track conductors, together with the first track conductors, forma grid, and that the second track conductors are insulated with respectto the first track conductors; applying a plurality of third trackconductors in a substantially parallel fashion above the first trackconductors and partly above the second track conductors, wherein anelectrical insulation is produced between the third track conductors andthe second track conductors; and producing, between each two adjacentsecond track conductors, an electrical contact for generating anelectrical contact with the first track conductors between each firsttrack conductor and the respective third track conductor lying above it.2. Method according to claim 1, in which the first track conductors areeach produced with a first width and the electrical contacts are eachproduced with a second width, the two widths being oriented parallel tothe first track conductors and perpendicular to the longitudinaldirection of the first track conductors, and the second width being lessthan the first width.
 3. Method according to claim 1, in which thesecond track conductors are produced above the first track conductors insuch a manner that in each case two adjacent first track conductors anda second track conductor lying above them form a transistor.
 4. Methodaccording to claim 1, in which, before the second track conductors areproduced, an oxide-nitride-oxide layer sequence is produced on thesemiconductor substrate between adjacent first track conductors. 5.Method according to claim 3, in which the transistor is produced in sucha manner that it can be used as a 2-bit memory transistor.
 6. Methodaccording to claim 1, in which the electrical contacts are formed insuch a manner that they bridge the second track conductors and thatelectrical contacts which are adjacent above one of the first trackconductors overlap and thereby themselves form the third trackconductors.